Micromachining of Novel SiC on Si Structures for Device and Sensor Applications
In this paper the multifariousness of SiC/Si heterostructures for device and sensor applications will be demonstrated. 3C-SiC based microelectromechanical resonator beams (MEMS) with different geometries actuated by the magnetomotive effect operating under ambient conditions were fabricated. The res...
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Veröffentlicht in: | Materials science forum 2006-01, Vol.527-529, p.1111-1114 |
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Hauptverfasser: | , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | In this paper the multifariousness of SiC/Si heterostructures for device and sensor applications
will be demonstrated. 3C-SiC based microelectromechanical resonator beams (MEMS) with
different geometries actuated by the magnetomotive effect operating under ambient conditions were
fabricated. The resonant frequency reaches values up to 2 MHz. The applications of these resonators
are the measurement of the viscosity of liquids or mass detection. Furthermore, photonic devices in
the form of SiC/Si infrared gratings for wavelength and polarization filters in infrared spectra are
processed. SiC wear protection for a dosing system with the possibility to dose nano- or picoliter
droplets of water based liquids as well as SiC nanomasking for catalytic agent nanostructures are
demonstrated. |
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ISSN: | 0255-5476 1662-9752 1662-9752 |
DOI: | 10.4028/www.scientific.net/MSF.527-529.1111 |