Micromachining of Novel SiC on Si Structures for Device and Sensor Applications

In this paper the multifariousness of SiC/Si heterostructures for device and sensor applications will be demonstrated. 3C-SiC based microelectromechanical resonator beams (MEMS) with different geometries actuated by the magnetomotive effect operating under ambient conditions were fabricated. The res...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Materials science forum 2006-01, Vol.527-529, p.1111-1114
Hauptverfasser: Cimalla, Volker, Rockstuhl, Carsten, Hein, Matthias A., Brueckner, Klemens, Pezoldt, Joerg, Förster, Christian, Ambacher, Oliver, Stubenrauch, M.
Format: Artikel
Sprache:eng
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:In this paper the multifariousness of SiC/Si heterostructures for device and sensor applications will be demonstrated. 3C-SiC based microelectromechanical resonator beams (MEMS) with different geometries actuated by the magnetomotive effect operating under ambient conditions were fabricated. The resonant frequency reaches values up to 2 MHz. The applications of these resonators are the measurement of the viscosity of liquids or mass detection. Furthermore, photonic devices in the form of SiC/Si infrared gratings for wavelength and polarization filters in infrared spectra are processed. SiC wear protection for a dosing system with the possibility to dose nano- or picoliter droplets of water based liquids as well as SiC nanomasking for catalytic agent nanostructures are demonstrated.
ISSN:0255-5476
1662-9752
1662-9752
DOI:10.4028/www.scientific.net/MSF.527-529.1111