Micromachining of Novel SiC on Si Structures for Device and Sensor Applications
In this paper the multifariousness of SiC/Si heterostructures for device and sensor applications will be demonstrated. 3C-SiC based microelectromechanical resonator beams (MEMS) with different geometries actuated by the magnetomotive effect operating under ambient conditions were fabricated. The res...
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| Veröffentlicht in: | Materials science forum 2006-01, Vol.527-529, p.1111-1114 |
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| creator | Cimalla, Volker Rockstuhl, Carsten Hein, Matthias A. Brueckner, Klemens Pezoldt, Joerg Förster, Christian Ambacher, Oliver Stubenrauch, M. |
| description | In this paper the multifariousness of SiC/Si heterostructures for device and sensor applications
will be demonstrated. 3C-SiC based microelectromechanical resonator beams (MEMS) with
different geometries actuated by the magnetomotive effect operating under ambient conditions were
fabricated. The resonant frequency reaches values up to 2 MHz. The applications of these resonators
are the measurement of the viscosity of liquids or mass detection. Furthermore, photonic devices in
the form of SiC/Si infrared gratings for wavelength and polarization filters in infrared spectra are
processed. SiC wear protection for a dosing system with the possibility to dose nano- or picoliter
droplets of water based liquids as well as SiC nanomasking for catalytic agent nanostructures are
demonstrated. |
| doi_str_mv | 10.4028/www.scientific.net/MSF.527-529.1111 |
| format | Article |
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will be demonstrated. 3C-SiC based microelectromechanical resonator beams (MEMS) with
different geometries actuated by the magnetomotive effect operating under ambient conditions were
fabricated. The resonant frequency reaches values up to 2 MHz. The applications of these resonators
are the measurement of the viscosity of liquids or mass detection. Furthermore, photonic devices in
the form of SiC/Si infrared gratings for wavelength and polarization filters in infrared spectra are
processed. SiC wear protection for a dosing system with the possibility to dose nano- or picoliter
droplets of water based liquids as well as SiC nanomasking for catalytic agent nanostructures are
demonstrated.</description><identifier>ISSN: 0255-5476</identifier><identifier>ISSN: 1662-9752</identifier><identifier>EISSN: 1662-9752</identifier><identifier>DOI: 10.4028/www.scientific.net/MSF.527-529.1111</identifier><language>eng</language><publisher>Trans Tech Publications Ltd</publisher><ispartof>Materials science forum, 2006-01, Vol.527-529, p.1111-1114</ispartof><rights>2006 Trans Tech Publications Ltd</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c374t-3a2fbd3f3ee95245ee2f92a353d28fe7bac1a87f1a209c90e1b4637c55e732b33</citedby><cites>FETCH-LOGICAL-c374t-3a2fbd3f3ee95245ee2f92a353d28fe7bac1a87f1a209c90e1b4637c55e732b33</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Uhttps://www.scientific.net/Image/TitleCover/55?width=600</thumbnail><link.rule.ids>314,776,780,27901,27902</link.rule.ids></links><search><creatorcontrib>Cimalla, Volker</creatorcontrib><creatorcontrib>Rockstuhl, Carsten</creatorcontrib><creatorcontrib>Hein, Matthias A.</creatorcontrib><creatorcontrib>Brueckner, Klemens</creatorcontrib><creatorcontrib>Pezoldt, Joerg</creatorcontrib><creatorcontrib>Förster, Christian</creatorcontrib><creatorcontrib>Ambacher, Oliver</creatorcontrib><creatorcontrib>Stubenrauch, M.</creatorcontrib><title>Micromachining of Novel SiC on Si Structures for Device and Sensor Applications</title><title>Materials science forum</title><description>In this paper the multifariousness of SiC/Si heterostructures for device and sensor applications
will be demonstrated. 3C-SiC based microelectromechanical resonator beams (MEMS) with
different geometries actuated by the magnetomotive effect operating under ambient conditions were
fabricated. The resonant frequency reaches values up to 2 MHz. The applications of these resonators
are the measurement of the viscosity of liquids or mass detection. Furthermore, photonic devices in
the form of SiC/Si infrared gratings for wavelength and polarization filters in infrared spectra are
processed. SiC wear protection for a dosing system with the possibility to dose nano- or picoliter
droplets of water based liquids as well as SiC nanomasking for catalytic agent nanostructures are
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will be demonstrated. 3C-SiC based microelectromechanical resonator beams (MEMS) with
different geometries actuated by the magnetomotive effect operating under ambient conditions were
fabricated. The resonant frequency reaches values up to 2 MHz. The applications of these resonators
are the measurement of the viscosity of liquids or mass detection. Furthermore, photonic devices in
the form of SiC/Si infrared gratings for wavelength and polarization filters in infrared spectra are
processed. SiC wear protection for a dosing system with the possibility to dose nano- or picoliter
droplets of water based liquids as well as SiC nanomasking for catalytic agent nanostructures are
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| title | Micromachining of Novel SiC on Si Structures for Device and Sensor Applications |
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