P-163: High Temperature Linear Nozzle Source for Large-Scale AMOLED

We have developed the High temperature linear nozzle source (HT LNS). Scanning deposition method with HT LNS provides the solution which keeps high material efficiency of the low temperature linear source, while solving problems concerning high temperature point array source.

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Veröffentlicht in:SID International Symposium Digest of technical papers 2016-05, Vol.47 (1), p.1734-1736
Hauptverfasser: Chi, Daejoon, Kim, Sungmoon, Seo, Hyun, Jung, Eunsang, Na, Younghyuck, Koh, Eunim
Format: Artikel
Sprache:eng
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Zusammenfassung:We have developed the High temperature linear nozzle source (HT LNS). Scanning deposition method with HT LNS provides the solution which keeps high material efficiency of the low temperature linear source, while solving problems concerning high temperature point array source.
ISSN:0097-966X
2168-0159
DOI:10.1002/sdtp.11048