P-163: High Temperature Linear Nozzle Source for Large-Scale AMOLED
We have developed the High temperature linear nozzle source (HT LNS). Scanning deposition method with HT LNS provides the solution which keeps high material efficiency of the low temperature linear source, while solving problems concerning high temperature point array source.
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Veröffentlicht in: | SID International Symposium Digest of technical papers 2016-05, Vol.47 (1), p.1734-1736 |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | We have developed the High temperature linear nozzle source (HT LNS). Scanning deposition method with HT LNS provides the solution which keeps high material efficiency of the low temperature linear source, while solving problems concerning high temperature point array source. |
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ISSN: | 0097-966X 2168-0159 |
DOI: | 10.1002/sdtp.11048 |