P-163: High Temperature Linear Nozzle Source for Large-Scale AMOLED

We have developed the High temperature linear nozzle source (HT LNS). Scanning deposition method with HT LNS provides the solution which keeps high material efficiency of the low temperature linear source, while solving problems concerning high temperature point array source.

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Veröffentlicht in:SID International Symposium Digest of technical papers 2016-05, Vol.47 (1), p.1734-1736
Hauptverfasser: Chi, Daejoon, Kim, Sungmoon, Seo, Hyun, Jung, Eunsang, Na, Younghyuck, Koh, Eunim
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container_title SID International Symposium Digest of technical papers
container_volume 47
creator Chi, Daejoon
Kim, Sungmoon
Seo, Hyun
Jung, Eunsang
Na, Younghyuck
Koh, Eunim
description We have developed the High temperature linear nozzle source (HT LNS). Scanning deposition method with HT LNS provides the solution which keeps high material efficiency of the low temperature linear source, while solving problems concerning high temperature point array source.
doi_str_mv 10.1002/sdtp.11048
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source Wiley Online Library Journals Frontfile Complete
subjects Arrays
Deposition
Efficient Source
Heat treatment
High temperature
High Temperature Source
Linear Source
Metal Source
Nozzles
OLED
Scanning
Technical papers
title P-163: High Temperature Linear Nozzle Source for Large-Scale AMOLED
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