(Best Paper Award) Aluminum Josephson Junction Formation on 200mm Wafers Using Different Oxidation Techniques

For superconducting quantum circuits with a large number of Qubits, reproducible components are crucial for reducing entanglement decoherence. Particularly for reliable industrial manufacturing on full-scale 200 mm' wafers, a very high uniformity level is required to ensure sufficient coherence...

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Veröffentlicht in:Meeting abstracts (Electrochemical Society) 2023-08, Vol.MA2023-01 (29), p.1791-1791
Hauptverfasser: Lang, Simon, Schewski, Alexandra, Eisele, Ignaz, Kutter, Christoph, Lerch, Wilfried
Format: Artikel
Sprache:eng
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