Manufacturing gigachips in the year 2005

10 years from now, we envision producing gigachips for an ever expanding electronics market at a cost per function that continues to decrease by approximately 25%/year. To meet this challenge, we must continue to pursue advanced concepts in factories and equipment that are synergistic with continuou...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Chatterjee, P.K., Doering, R.R.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:10 years from now, we envision producing gigachips for an ever expanding electronics market at a cost per function that continues to decrease by approximately 25%/year. To meet this challenge, we must continue to pursue advanced concepts in factories and equipment that are synergistic with continuous/synchronous manufacturing. In particular, such opportunities include: larger wafers, single-wafer processing, clustering/multiprocessing, real-time process/factory control, integrated minienvironments, and standards-based modular design. In most cases, the development and implementation of such change will require new levels of cooperation among suppliers, customers, and competitors in the semiconductor industry.
DOI:10.1109/VLSIT.1995.520855