Manufacturing gigachips in the year 2005

10 years from now, we envision producing gigachips for an ever expanding electronics market at a cost per function that continues to decrease by approximately 25%/year. To meet this challenge, we must continue to pursue advanced concepts in factories and equipment that are synergistic with continuou...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Chatterjee, P.K., Doering, R.R.
Format: Tagungsbericht
Sprache:eng
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