Method of forming a piezoelectric actuator of an inkjet head

A method of forming a piezoelectric actuator on a vibration plate to provide a driving force to each of a plurality of pressure chambers includes forming a lower electrode on the vibration plate, forming a piezoelectric layer on the lower electrode at a position corresponding to each of the pressure...

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Bibliographische Detailangaben
Hauptverfasser: LEE TAE-KYUNG, LEE KYO-YEOL, LEE JAEANG, LEE HWA-SUN, LIM SEUNG-MO, CHUNG JAE-WOO
Format: Patent
Sprache:eng
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Zusammenfassung:A method of forming a piezoelectric actuator on a vibration plate to provide a driving force to each of a plurality of pressure chambers includes forming a lower electrode on the vibration plate, forming a piezoelectric layer on the lower electrode at a position corresponding to each of the pressure chambers, forming a supporting pad on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, forming an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad, and bonding the upper electrode to a driving circuit above the supporting pad to receive a voltage from the driving circuit.