Method of forming a piezoelectric actuator of an inkjet head

A method of forming a piezoelectric actuator on a vibration plate to provide a driving force to each of a plurality of pressure chambers includes forming a lower electrode on the vibration plate, forming a piezoelectric layer on the lower electrode at a position corresponding to each of the pressure...

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Bibliographische Detailangaben
Hauptverfasser:	LEE TAE-KYUNG, LEE KYO-YEOL, LEE JAEANG, LEE HWA-SUN, LIM SEUNG-MO, CHUNG JAE-WOO
Format:	Patent
Sprache:	eng
Schlagworte:	CONVERSION OR DISTRIBUTION OF ELECTRIC POWER CORRECTION OF TYPOGRAPHICAL ERRORS DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME LINING MACHINES LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS PERFORMING OPERATIONS PRINTING PUBLIC ADDRESS SYSTEMS SELECTIVE PRINTING MECHANISMS STAMPS TRANSPORTING TYPEWRITERS
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