MICROBOLOMETER SYSTEMS AND METHODS

Microbolometer systems and methods are provided herein. For example, an infrared imaging device includes a substrate having contacts and a surface. The surface defines a plane. The infrared imaging device further includes a microbolometer array coupled to the substrate. Each microbolometer of the mi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Dale, James L, Cannata, Robert F, Kurth, Eric A, Sigurdson, Marin, Chan, Christopher
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Microbolometer systems and methods are provided herein. For example, an infrared imaging device includes a substrate having contacts and a surface. The surface defines a plane. The infrared imaging device further includes a microbolometer array coupled to the substrate. Each microbolometer of the microbolometer array includes a second having a first dimension that extends in a first direction substantially parallel to the plane and a second dimension that extends in a second direction away from the plane. The first dimension is less than the second dimension. The segment includes a metal layer and a layer formed on a side of the metal layer.