MICROBOLOMETER SYSTEMS AND METHODS

Microbolometer systems and methods are provided herein. For example, an infrared imaging device includes a substrate having contacts and a surface. The surface defines a plane. The infrared imaging device further includes a microbolometer array coupled to the substrate. Each microbolometer of the mi...

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Hauptverfasser: Dale, James L, Cannata, Robert F, Kurth, Eric A, Sigurdson, Marin, Chan, Christopher
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creator Dale, James L
Cannata, Robert F
Kurth, Eric A
Sigurdson, Marin
Chan, Christopher
description Microbolometer systems and methods are provided herein. For example, an infrared imaging device includes a substrate having contacts and a surface. The surface defines a plane. The infrared imaging device further includes a microbolometer array coupled to the substrate. Each microbolometer of the microbolometer array includes a second having a first dimension that extends in a first direction substantially parallel to the plane and a second dimension that extends in a second direction away from the plane. The first dimension is less than the second dimension. The segment includes a metal layer and a layer formed on a side of the metal layer.
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subjects BASIC ELECTRIC ELEMENTS
COLORIMETRY
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
PHYSICS
PICTORIAL COMMUNICATION, e.g. TELEVISION
RADIATION PYROMETRY
SEMICONDUCTOR DEVICES
TESTING
title MICROBOLOMETER SYSTEMS AND METHODS
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