METHOD AND DEVICE FOR MANUFACTURING THIN FILM ALUMINUM WIRING SUBSTRATE

PURPOSE:To prevent the generation of short-circuit on wirings by a method wherein a thin film Al wiring is heated up to the temperature range from the lowest temperature at which whiskers are generated and the melting point of Al or thereabout, it is slowly cooled, the internal stress is reduced, an...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SEKINO SHIGEJI, FUKAI YASUJI, KISHIDA JUICHI
Format: Patent
Sprache:eng
Schlagworte:
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