METHOD FOR DISPERSING SPACER

PURPOSE:To simply distribute spacer particulates to a non-electrode part of a substrate by sticking ions with a positive or negative polarity only to the non-electrode part to electrify it and selectively sticking spacer particulates electrified with reverse polarity to the electrified non-spacer pa...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MITAMURA SADAO, MUNENO RYUICHI, YAMAZOE HIROSHI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PURPOSE:To simply distribute spacer particulates to a non-electrode part of a substrate by sticking ions with a positive or negative polarity only to the non-electrode part to electrify it and selectively sticking spacer particulates electrified with reverse polarity to the electrified non-spacer particulates electrified with reverse polarity to the electrified non-electrode part. CONSTITUTION:The non-electrode part formed on the surface of the substrate 1 is positively or negatively charged and an electrode part is practically turned to zero potential, or the substrate 1 receiving the potential of the reverse polarity against the non-electrode part is exposed to a spacer particulate group 5 and the spacer particulates 5 are stuck to the non-electrode part. Concretely the whole surface of the substrate is exposed to a positive or negative polarity ion flow to charge it, prescribed potential is applied to the electrode part, only the non-electrode part on the surface of the substrate 1 is held at the positively or negatively electrified state, and the electrode part is practically turned to zero potential or the reverse potential against the non-electrode part. Thereby the spacer particulates can simply be distributed to the non-electrode part.