METHOD FOR DISPERSING SPACER

PURPOSE:To simply distribute spacer particulates to a non-electrode part of a substrate by sticking ions with a positive or negative polarity only to the non-electrode part to electrify it and selectively sticking spacer particulates electrified with reverse polarity to the electrified non-spacer pa...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MITAMURA SADAO, MUNENO RYUICHI, YAMAZOE HIROSHI
Format: Patent
Sprache:eng
Schlagworte:
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