METAL DECONTAMINATION AGENT AND PRODUCT CLEANING METHOD
To provide a metal decontamination agent capable of sufficiently removing metals, especially polyvalent metals, adhering to a product, and a product cleaning method by ultrapure water to which the metal decontamination agent has been added.SOLUTION: A metal decontamination agent is added to ultrapur...
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Format: | Patent |
Sprache: | eng ; jpn |
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Zusammenfassung: | To provide a metal decontamination agent capable of sufficiently removing metals, especially polyvalent metals, adhering to a product, and a product cleaning method by ultrapure water to which the metal decontamination agent has been added.SOLUTION: A metal decontamination agent is added to ultrapure water, wherein the metal decontamination agent contains a polymer having an ion exchange group, such as polystyrene sulfonic acid and the like. The molecular weight of the metal decontamination agent is 100,000 or more. A product cleaning method is for cleaning a product with ultrapure water to which the metal decontamination agent has been added. The metal decontamination agent and the product cleaning method are particularly suitable for the removal of divalent or higher metals.SELECTED DRAWING: Figure 1
【課題】製品に付着した金属、特に多価金属を十分に除去することができる金属汚染除去剤及びこの金属汚染除去剤を添加した超純水による製品洗浄方法を提供する。【解決手段】超純水に添加する金属汚染除去剤であって、ポリスチレンスルホン酸などの、イオン交換基を有するポリマーを含有することを特徴とする金属汚染除去剤。金属汚染除去剤の分子量は10万以上である。この金属汚染除去剤を添加した超純水で製品を洗浄する製品洗浄方法。この金属汚染除去剤及び製品洗浄方法は、特に2価以上の金属の除去に好適である。【選択図】図1 |
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