METAL DECONTAMINATION AGENT AND PRODUCT CLEANING METHOD

To provide a metal decontamination agent capable of sufficiently removing metals, especially polyvalent metals, adhering to a product, and a product cleaning method by ultrapure water to which the metal decontamination agent has been added.SOLUTION: A metal decontamination agent is added to ultrapur...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	HOSHI SHIGEYUKI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY METALLURGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES THEIR RELEVANT APPARATUS TRANSPORTING TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
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