AQUEOUS POLISHING COMPOSITIONS CONTAINING N-SUBSTITUTED DIAZENIUM DIOXIDES AND/OR N'-HYDROXY-DIAZENIUM OXIDE SALTS

An aqueous polishing composition comprising (A) at least one water-soluble or water-dispersible compound selected from the group consisting of N-substituted diazenium dioxides and N'-hydroxy-diazenium oxide salts; and (B) at least one type of abrasive particles; the use of the compounds (A) for...

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Bibliographische Detailangaben
Hauptverfasser: LI, YUZHUO, NOLLER, BASTIAN, VENKATARAMAN, SHYAM SUNDAR, USMAN IBRAHIM, SHEIK ANSAR, FRANZ, DIANA, PINDER, HARVEY WAYNE
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:An aqueous polishing composition comprising (A) at least one water-soluble or water-dispersible compound selected from the group consisting of N-substituted diazenium dioxides and N'-hydroxy-diazenium oxide salts; and (B) at least one type of abrasive particles; the use of the compounds (A) for manufacturing electrical, mechanical and optical devices and a process for polishing substrate materials for electrical, mechanical and optical devices making use of the aqueous polishing composition.