Flexure with integral actuator
A flexure (10) for a micro-electro-mechanical device includes a longitudinal beam (12). An actuator (18) integral to the beam (12) acts to flex the beam (12) when activated.
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A flexure (10) for a micro-electro-mechanical device includes a longitudinal beam (12). An actuator (18) integral to the beam (12) acts to flex the beam (12) when activated. |
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