Flexure with integral actuator

A flexure (10) for a micro-electro-mechanical device includes a longitudinal beam (12). An actuator (18) integral to the beam (12) acts to flex the beam (12) when activated.

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1. Verfasser: IVES, THOMAS WAYNE
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Sprache:eng ; fre ; ger
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creator IVES, THOMAS WAYNE
description A flexure (10) for a micro-electro-mechanical device includes a longitudinal beam (12). An actuator (18) integral to the beam (12) acts to flex the beam (12) when activated.
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language eng ; fre ; ger
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subjects CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
TRANSPORTING
title Flexure with integral actuator
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