Ion plating rotating device with double rotating modes

The utility model discloses an ion plating rotating device with double rotating modes. The ion plating rotating device comprises a base plate, a placing plate, a plurality of self-rotating plates and a transmission device, the transmission device is arranged below the chassis, and the self-rotating...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHOU LIN, JIANG JIALI, ZHU ENGUANG, YANG BING, ZHU YANGJUN, LU JIARI, PAN CHONG'EN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model discloses an ion plating rotating device with double rotating modes. The ion plating rotating device comprises a base plate, a placing plate, a plurality of self-rotating plates and a transmission device, the transmission device is arranged below the chassis, and the self-rotating disc is arranged above the shelving disc; the transmission device comprises a rotating shaft driven by a motor, a driving gear and a plurality of driven gears; the main gear is arranged in the middle of the bottom surface of the chassis; the rotating shaft is connected with the main gear and the chassis; the driven gear is meshed with the outer edge of the driving gear and is connected with the self-rotating disc through a driven rotating shaft; the rotating shaft rotates to drive the driving gear to rotate, so that the driven gear drives the self-rotating disc to rotate; the rotating shaft drives the chassis to rotate and then drives the shelving disc connected with the chassis to rotate; therefore, the device pro