Ion plating rotating device with double rotating modes

The utility model discloses an ion plating rotating device with double rotating modes. The ion plating rotating device comprises a base plate, a placing plate, a plurality of self-rotating plates and a transmission device, the transmission device is arranged below the chassis, and the self-rotating...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHOU LIN, JIANG JIALI, ZHU ENGUANG, YANG BING, ZHU YANGJUN, LU JIARI, PAN CHONG'EN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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