Application of electron-beam induced plasma probes to inspection, test, debug and surface modifications
An electron-beam induced plasmas is utilized to establish a non-mechanical, electrical contact to a device of interest. This plasma source may be referred to as atmospheric plasma source and may be configured to provide a plasma column of very fine diameter and controllable characteristics. The plas...
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Zusammenfassung: | An electron-beam induced plasmas is utilized to establish a non-mechanical, electrical contact to a device of interest. This plasma source may be referred to as atmospheric plasma source and may be configured to provide a plasma column of very fine diameter and controllable characteristics. The plasma column traverses the atmospheric space between the plasma source into the atmosphere and the device of interest and acts as an electrical path to the device of interest in such a way that a characteristic electrical signal can be collected from the device. Additionally, by controlling the gases flowing into the plasma column the probe may be used for surface modification, etching and deposition.
本发明揭示种电子束诱发等离子体,其用于与所关注装置建立非机械、电接触。此等离子体源可称为大气等离子体源且可经配置以提供具有极细直径及可控特性的等离子体柱。所述等离子体柱横穿在所述等离子体源之间的大气空间进入所述大气及所述所关注装置,且以可从所述装置收集特性电信号的方式充当到所述所关注装置的电路径。另外,通过控制流入所述等离子体柱的气体,探针可用于表面修改、蚀刻及沉积。 |
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