Application of electron-beam induced plasma probes to inspection, test, debug and surface modifications

An electron-beam induced plasmas is utilized to establish a non-mechanical, electrical contact to a device of interest. This plasma source may be referred to as atmospheric plasma source and may be configured to provide a plasma column of very fine diameter and controllable characteristics. The plas...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SALEH NEDAL, KRISHNASWAMI SRIRAM, TOET DANIEL, GLAZER ARIE, STERLING ENRIQUE, LOEWINGER RONEN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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