Method for detecting defects of 8-inch polished wafers through light-transmitting mirror

The invention provides a method for detecting the defects of 8-inch polished wafers through a light-transmitting mirror, wherein in the method, the defects of the 8-inch polished wafers are detected through the light-transmitting mirror. By means of the method, the surface structural properties of t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YAN JIZENG, WU WEI, LUO CHONG, LIU QI, WANG GUORUI
Format: Patent
Sprache:eng
Schlagworte:
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