Bulk acoustic wave resonator, bulk acoustic wave filter and their corresponding methods of manufacture

A bulk acoustic wave (BAW) resonator (38) includes a substrate (30), and two electrodes (32, 36) stacked on the substrate (30), and at least one piezoelectric layer (34) interposed between the two electrodes (32, 36). The two electrodes (32, 36) and the piezoelectric layer (34) are at least partiall...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: MAO SHAU-GANG, DENG WEI-KUNG
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A bulk acoustic wave (BAW) resonator (38) includes a substrate (30), and two electrodes (32, 36) stacked on the substrate (30), and at least one piezoelectric layer (34) interposed between the two electrodes (32, 36). The two electrodes (32, 36) and the piezoelectric layer (34) are at least partially overlapped with each other in a vertical projection direction, and one of the two electrodes (32, 36) has a plurality of openings (32A, 36A).