Bulk acoustic wave resonator, bulk acoustic wave filter and their corresponding methods of manufacture

Bulk acoustic wave resonator, bulk acoustic wave filter and their corresponding methods of manufacture

A bulk acoustic wave (BAW) resonator (38) includes a substrate (30), and two electrodes (32, 36) stacked on the substrate (30), and at least one piezoelectric layer (34) interposed between the two electrodes (32, 36). The two electrodes (32, 36) and the piezoelectric layer (34) are at least partiall...

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Hauptverfasser: MAO SHAU-GANG, DENG WEI-KUNG
Format: Patent
Sprache:eng
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BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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creator MAO SHAU-GANG
DENG WEI-KUNG
description A bulk acoustic wave (BAW) resonator (38) includes a substrate (30), and two electrodes (32, 36) stacked on the substrate (30), and at least one piezoelectric layer (34) interposed between the two electrodes (32, 36). The two electrodes (32, 36) and the piezoelectric layer (34) are at least partially overlapped with each other in a vertical projection direction, and one of the two electrodes (32, 36) has a plurality of openings (32A, 36A).
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subjects BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
title Bulk acoustic wave resonator, bulk acoustic wave filter and their corresponding methods of manufacture
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