CURRENT CHANGE LIMITING DEVICE

In a method of limiting the current (I out) flowing between a plasma chamber (3) and a power supply (2), wherein the current change di/dt is limited if the current exceeds a predetermined current by a by a current change limiting device (7, 40) which is provided in the current path between the power...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: OZIMEK, PAWEL, KLIMCZAK, ANDRZEJ, BUGYI, RAFAL
Format: Patent
Sprache:eng ; fre
Schlagworte:
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