CURRENT CHANGE LIMITING DEVICE
In a method of limiting the current (I out) flowing between a plasma chamber (3) and a power supply (2), wherein the current change di/dt is limited if the current exceeds a predetermined current by a by a current change limiting device (7, 40) which is provided in the current path between the power...
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| creator | OZIMEK, PAWEL KLIMCZAK, ANDRZEJ BUGYI, RAFAL |
| description | In a method of limiting the current (I out) flowing between a plasma chamber (3) and a power supply (2), wherein the current change di/dt is limited if the current exceeds a predetermined current by a by a current change limiting device (7, 40) which is provided in the current path between the power supply (2) and the plasma chamber (3).
Dans une méthode de limitation dintensité du courant (I sortant) circulant entre une chambre de plasma (3) et une source dalimentation (2), la variation dintensité du courant di/dt est limitée si lintensité du courant dépasse une intensité de courant prédéterminée par un dispositif de limitation de variation dintensité du courant (7, 40) qui est présent sur le parcours de courant entre la source dalimentation (2) et la chambre de plasma (3). |
| format | Patent |
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Dans une méthode de limitation dintensité du courant (I sortant) circulant entre une chambre de plasma (3) et une source dalimentation (2), la variation dintensité du courant di/dt est limitée si lintensité du courant dépasse une intensité de courant prédéterminée par un dispositif de limitation de variation dintensité du courant (7, 40) qui est présent sur le parcours de courant entre la source dalimentation (2) et la chambre de plasma (3).</description><language>eng ; fre</language><subject>BASIC ELECTRIC ELEMENTS ; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY ; EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS ; GENERATION</subject><creationdate>2016</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20160412&DB=EPODOC&CC=CA&NR=2646522C$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20160412&DB=EPODOC&CC=CA&NR=2646522C$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>OZIMEK, PAWEL</creatorcontrib><creatorcontrib>KLIMCZAK, ANDRZEJ</creatorcontrib><creatorcontrib>BUGYI, RAFAL</creatorcontrib><title>CURRENT CHANGE LIMITING DEVICE</title><description>In a method of limiting the current (I out) flowing between a plasma chamber (3) and a power supply (2), wherein the current change di/dt is limited if the current exceeds a predetermined current by a by a current change limiting device (7, 40) which is provided in the current path between the power supply (2) and the plasma chamber (3).
Dans une méthode de limitation dintensité du courant (I sortant) circulant entre une chambre de plasma (3) et une source dalimentation (2), la variation dintensité du courant di/dt est limitée si lintensité du courant dépasse une intensité de courant prédéterminée par un dispositif de limitation de variation dintensité du courant (7, 40) qui est présent sur le parcours de courant entre la source dalimentation (2) et la chambre de plasma (3).</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CONVERSION OR DISTRIBUTION OF ELECTRIC POWER</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><subject>EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS</subject><subject>GENERATION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2016</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZJBzDg0KcvULUXD2cPRzd1Xw8fT1DPH0c1dwcQ3zdHblYWBNS8wpTuWF0twM8m6uIc4euqkF-fGpxQWJyal5qSXxzo5GZiZmpkZGzsaEVQAAKQsgVw</recordid><startdate>20160412</startdate><enddate>20160412</enddate><creator>OZIMEK, PAWEL</creator><creator>KLIMCZAK, ANDRZEJ</creator><creator>BUGYI, RAFAL</creator><scope>EVB</scope></search><sort><creationdate>20160412</creationdate><title>CURRENT CHANGE LIMITING DEVICE</title><author>OZIMEK, PAWEL ; KLIMCZAK, ANDRZEJ ; BUGYI, RAFAL</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CA2646522C3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre</language><creationdate>2016</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CONVERSION OR DISTRIBUTION OF ELECTRIC POWER</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><topic>EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS</topic><topic>GENERATION</topic><toplevel>online_resources</toplevel><creatorcontrib>OZIMEK, PAWEL</creatorcontrib><creatorcontrib>KLIMCZAK, ANDRZEJ</creatorcontrib><creatorcontrib>BUGYI, RAFAL</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>OZIMEK, PAWEL</au><au>KLIMCZAK, ANDRZEJ</au><au>BUGYI, RAFAL</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>CURRENT CHANGE LIMITING DEVICE</title><date>2016-04-12</date><risdate>2016</risdate><abstract>In a method of limiting the current (I out) flowing between a plasma chamber (3) and a power supply (2), wherein the current change di/dt is limited if the current exceeds a predetermined current by a by a current change limiting device (7, 40) which is provided in the current path between the power supply (2) and the plasma chamber (3).
Dans une méthode de limitation dintensité du courant (I sortant) circulant entre une chambre de plasma (3) et une source dalimentation (2), la variation dintensité du courant di/dt est limitée si lintensité du courant dépasse une intensité de courant prédéterminée par un dispositif de limitation de variation dintensité du courant (7, 40) qui est présent sur le parcours de courant entre la source dalimentation (2) et la chambre de plasma (3).</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS GENERATION |
| title | CURRENT CHANGE LIMITING DEVICE |
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