Micro mechanical systems principles and technology
In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution...
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| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Amsterdam New York
Elsevier
1998
|
| Schriftenreihe: | Handbook of sensors and actuators
v. 6 |
| Schlagworte: | |
| Online-Zugang: | FLA01 URL des Erstveröffentlichers URL des Erstveröffentlichers URL des Erstveröffentlichers |
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| 520 | |a In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems | ||
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| id | DE-604.BV046124085 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T08:35:49Z |
| institution | BVB |
| isbn | 9780080536545 0080536549 9780444823632 0444823638 1282284975 9781282284975 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-031504538 |
| oclc_num | 183633551 |
| open_access_boolean | |
| physical | 1 online resource (viii, 268 pages) illustrations |
| psigel | ZDB-33-ESD ZDB-33-ESD FLA_PDA_ESD |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | Elsevier |
| record_format | marc |
| series2 | Handbook of sensors and actuators |
| spelling | Micro mechanical systems principles and technology edited by T. Fukuda and W. Menz Amsterdam New York Elsevier 1998 1 online resource (viii, 268 pages) illustrations txt rdacontent c rdamedia cr rdacarrier Handbook of sensors and actuators v. 6 Includes bibliographical references In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems TECHNOLOGY & ENGINEERING / Mechanical bisacsh Microelectromechanical systems fast Tecnologia larpcal Engenharia eletrônica larpcal Microactionneurs ram Microtechniques ram Micromécanique (ingénierie) ram Mikromechanik gnd Mikrosystemtechnik gnd Microelectromechanical systems Handbooks, manuals, etc Mikromechanik (DE-588)4205811-9 gnd rswk-swf Mikroaktor (DE-588)4620161-0 gnd rswk-swf Mikrosensor (DE-588)4561097-6 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 s 1\p DE-604 Mikromechanik (DE-588)4205811-9 s 2\p DE-604 Mikrosensor (DE-588)4561097-6 s 3\p DE-604 Mikroaktor (DE-588)4620161-0 s 4\p DE-604 Fukuda, T. 1948- Sonstige oth Menz, W. Sonstige oth http://www.sciencedirect.com/science/book/9780444823632 Verlag URL des Erstveröffentlichers Volltext http://www.sciencedirect.com/science/publication?issn=13862766&volume=6 Verlag URL des Erstveröffentlichers Volltext http://www.sciencedirect.com/science/handbooks/13862766/6 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 4\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Micro mechanical systems principles and technology TECHNOLOGY & ENGINEERING / Mechanical bisacsh Microelectromechanical systems fast Tecnologia larpcal Engenharia eletrônica larpcal Microactionneurs ram Microtechniques ram Micromécanique (ingénierie) ram Mikromechanik gnd Mikrosystemtechnik gnd Microelectromechanical systems Handbooks, manuals, etc Mikromechanik (DE-588)4205811-9 gnd Mikroaktor (DE-588)4620161-0 gnd Mikrosensor (DE-588)4561097-6 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| subject_GND | (DE-588)4205811-9 (DE-588)4620161-0 (DE-588)4561097-6 (DE-588)4221617-5 |
| title | Micro mechanical systems principles and technology |
| title_auth | Micro mechanical systems principles and technology |
| title_exact_search | Micro mechanical systems principles and technology |
| title_full | Micro mechanical systems principles and technology edited by T. Fukuda and W. Menz |
| title_fullStr | Micro mechanical systems principles and technology edited by T. Fukuda and W. Menz |
| title_full_unstemmed | Micro mechanical systems principles and technology edited by T. Fukuda and W. Menz |
| title_short | Micro mechanical systems |
| title_sort | micro mechanical systems principles and technology |
| title_sub | principles and technology |
| topic | TECHNOLOGY & ENGINEERING / Mechanical bisacsh Microelectromechanical systems fast Tecnologia larpcal Engenharia eletrônica larpcal Microactionneurs ram Microtechniques ram Micromécanique (ingénierie) ram Mikromechanik gnd Mikrosystemtechnik gnd Microelectromechanical systems Handbooks, manuals, etc Mikromechanik (DE-588)4205811-9 gnd Mikroaktor (DE-588)4620161-0 gnd Mikrosensor (DE-588)4561097-6 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| topic_facet | TECHNOLOGY & ENGINEERING / Mechanical Microelectromechanical systems Tecnologia Engenharia eletrônica Microactionneurs Microtechniques Micromécanique (ingénierie) Mikromechanik Mikrosystemtechnik Microelectromechanical systems Handbooks, manuals, etc Mikroaktor Mikrosensor |
| url | http://www.sciencedirect.com/science/book/9780444823632 http://www.sciencedirect.com/science/publication?issn=13862766&volume=6 http://www.sciencedirect.com/science/handbooks/13862766/6 |
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