Progress in SOI Structures and Devices Operating at Extreme Conditions
A review of the electrical properties, performance and physical mechanisms of the main silicon-on-insulator (SOI) materials and devices. Particular attention is paid to the reliability of SOI structures operating in harsh conditions. The first part of the book deals with material technology and desc...
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| Format: | Elektronisch E-Book |
| Sprache: | English |
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Dordrecht
Springer Netherlands
2002
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| Schriftenreihe: | NATO Science Series, Series II: Mathematics, Physics and Chemistry
58 |
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| Online-Zugang: | DE-703 URL des Erstveröffentlichers |
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| 245 | 1 | 0 | |a Progress in SOI Structures and Devices Operating at Extreme Conditions |c edited by F. Balestra, A. Nazarov, V. S. Lysenko |
| 246 | 1 | 3 | |a Proceedings of the NATO Advanced Research Workshop, held in Kyiv, Ukraine, October 15-20, 2000 |
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| 520 | |a A review of the electrical properties, performance and physical mechanisms of the main silicon-on-insulator (SOI) materials and devices. Particular attention is paid to the reliability of SOI structures operating in harsh conditions. The first part of the book deals with material technology and describes the SIMOX and ELTRAN technologies, the smart-cut technique, SiCOI structures and MBE growth. The second part covers reliability of devices operating under extreme conditions, with an examination of low and high temperature operation of deep submicron MOSFETs and novel SOI technologies and circuits, SOI in harsh environments and the properties of the buried oxide. The third part deals with the characterization of advanced SOI materials and devices, covering laser-recrystallized SOI layers, ultrashort SOI MOSFETs and nanostructures, gated diodes and SOI devices produced by a variety of techniques. The last part reviews future prospects for SOI structures, analyzing wafer bonding techniques, applications of oxidized porous silicon, semi-insulating silicon materials, self-organization of silicon dots and wires on SOI and some new physical phenomena | ||
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| id | DE-604.BV045152248 |
| illustrated | Not Illustrated |
| indexdate | 2024-12-24T06:50:50Z |
| institution | BVB |
| isbn | 9789401003391 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030541916 |
| oclc_num | 1050939472 |
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| physical | 1 Online-Ressource (X, 351 p) |
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| publisher | Springer Netherlands |
| record_format | marc |
| series2 | NATO Science Series, Series II: Mathematics, Physics and Chemistry |
| spelling | Progress in SOI Structures and Devices Operating at Extreme Conditions edited by F. Balestra, A. Nazarov, V. S. Lysenko Proceedings of the NATO Advanced Research Workshop, held in Kyiv, Ukraine, October 15-20, 2000 Dordrecht Springer Netherlands 2002 1 Online-Ressource (X, 351 p) txt rdacontent c rdamedia cr rdacarrier NATO Science Series, Series II: Mathematics, Physics and Chemistry 58 A review of the electrical properties, performance and physical mechanisms of the main silicon-on-insulator (SOI) materials and devices. Particular attention is paid to the reliability of SOI structures operating in harsh conditions. The first part of the book deals with material technology and describes the SIMOX and ELTRAN technologies, the smart-cut technique, SiCOI structures and MBE growth. The second part covers reliability of devices operating under extreme conditions, with an examination of low and high temperature operation of deep submicron MOSFETs and novel SOI technologies and circuits, SOI in harsh environments and the properties of the buried oxide. The third part deals with the characterization of advanced SOI materials and devices, covering laser-recrystallized SOI layers, ultrashort SOI MOSFETs and nanostructures, gated diodes and SOI devices produced by a variety of techniques. The last part reviews future prospects for SOI structures, analyzing wafer bonding techniques, applications of oxidized porous silicon, semi-insulating silicon materials, self-organization of silicon dots and wires on SOI and some new physical phenomena Engineering Circuits and Systems Electronics and Microelectronics, Instrumentation Electrical Engineering Optical and Electronic Materials Characterization and Evaluation of Materials Electrical engineering Electronics Microelectronics Electronic circuits Optical materials Electronic materials Materials science Balestra, F. edt Nazarov, A. edt Lysenko, V. S. edt Erscheint auch als Druck-Ausgabe 9781402005763 https://doi.org/10.1007/978-94-010-0339-1 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Progress in SOI Structures and Devices Operating at Extreme Conditions Engineering Circuits and Systems Electronics and Microelectronics, Instrumentation Electrical Engineering Optical and Electronic Materials Characterization and Evaluation of Materials Electrical engineering Electronics Microelectronics Electronic circuits Optical materials Electronic materials Materials science |
| title | Progress in SOI Structures and Devices Operating at Extreme Conditions |
| title_alt | Proceedings of the NATO Advanced Research Workshop, held in Kyiv, Ukraine, October 15-20, 2000 |
| title_auth | Progress in SOI Structures and Devices Operating at Extreme Conditions |
| title_exact_search | Progress in SOI Structures and Devices Operating at Extreme Conditions |
| title_full | Progress in SOI Structures and Devices Operating at Extreme Conditions edited by F. Balestra, A. Nazarov, V. S. Lysenko |
| title_fullStr | Progress in SOI Structures and Devices Operating at Extreme Conditions edited by F. Balestra, A. Nazarov, V. S. Lysenko |
| title_full_unstemmed | Progress in SOI Structures and Devices Operating at Extreme Conditions edited by F. Balestra, A. Nazarov, V. S. Lysenko |
| title_short | Progress in SOI Structures and Devices Operating at Extreme Conditions |
| title_sort | progress in soi structures and devices operating at extreme conditions |
| topic | Engineering Circuits and Systems Electronics and Microelectronics, Instrumentation Electrical Engineering Optical and Electronic Materials Characterization and Evaluation of Materials Electrical engineering Electronics Microelectronics Electronic circuits Optical materials Electronic materials Materials science |
| topic_facet | Engineering Circuits and Systems Electronics and Microelectronics, Instrumentation Electrical Engineering Optical and Electronic Materials Characterization and Evaluation of Materials Electrical engineering Electronics Microelectronics Electronic circuits Optical materials Electronic materials Materials science |
| url | https://doi.org/10.1007/978-94-010-0339-1 |
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