Progress in SOI Structures and Devices Operating at Extreme Conditions

A review of the electrical properties, performance and physical mechanisms of the main silicon-on-insulator (SOI) materials and devices. Particular attention is paid to the reliability of SOI structures operating in harsh conditions. The first part of the book deals with material technology and desc...

Ausführliche Beschreibung

Bibliographische Detailangaben

Weitere Verfasser:	Balestra, F. (HerausgeberIn), Nazarov, A. (HerausgeberIn), Lysenko, V. S. (HerausgeberIn)
Format:	Elektronisch E-Book
Sprache:	English
Veröffentlicht:	Dordrecht Springer Netherlands 2002
Schriftenreihe:	NATO Science Series, Series II: Mathematics, Physics and Chemistry 58
Schlagworte:	Engineering Circuits and Systems Electronics and Microelectronics, Instrumentation Electrical Engineering Optical and Electronic Materials Characterization and Evaluation of Materials Electrical engineering Electronics Microelectronics Electronic circuits Optical materials Electronic materials Materials science
Online-Zugang:	DE-703 URL des Erstveröffentlichers
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