Proceedings of the Topical Conference on Surface Microengineering 23 - 24 Oct. 1989, Hynes Convention Center, Boston, Mass.
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|---|---|
| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
New York
American Inst. of Physics
1990
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| Schriftenreihe: | Journal of vacuum science and technology / A
8,4 |
| Schlagworte: | |
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| 245 | 1 | 0 | |a Proceedings of the Topical Conference on Surface Microengineering |b 23 - 24 Oct. 1989, Hynes Convention Center, Boston, Mass. |c spec. ed.: William N. Carr |
| 264 | 1 | |a New York |b American Inst. of Physics |c 1990 | |
| 300 | |a X S., S. 3577 - 3638 |b graph. Darst. | ||
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| 490 | 0 | |a Journal of vacuum science and technology / A |v 8,4 | |
| 500 | |a Stücktitelaufnahme zu e. Zeitschriftenh. | ||
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| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1989 |z Boston Mass. |2 gnd-content | |
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| 700 | 1 | |a Carr, William N. |e Sonstige |4 oth | |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-005925416 | |
Datensatz im Suchindex
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| author_facet | Topical Conference on Surface Microengineering (1989, Boston, Mass.) |
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| genre_facet | Konferenzschrift 1989 Boston Mass. |
| id | DE-604.BV008973741 |
| illustrated | Illustrated |
| indexdate | 2024-12-23T12:55:18Z |
| institution | BVB |
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| physical | X S., S. 3577 - 3638 graph. Darst. |
| publishDate | 1990 |
| publishDateSearch | 1990 |
| publishDateSort | 1990 |
| publisher | American Inst. of Physics |
| record_format | marc |
| series2 | Journal of vacuum science and technology / A |
| spelling | Topical Conference on Surface Microengineering (1989, Boston, Mass.) Verfasser (DE-588)16131020-5 aut Proceedings of the Topical Conference on Surface Microengineering 23 - 24 Oct. 1989, Hynes Convention Center, Boston, Mass. spec. ed.: William N. Carr New York American Inst. of Physics 1990 X S., S. 3577 - 3638 graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science and technology / A 8,4 Stücktitelaufnahme zu e. Zeitschriftenh. Oberflächenbehandlung (DE-588)4042908-8 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Oberfläche (DE-588)4042907-6 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1989 Boston Mass. gnd-content Mikrosystemtechnik (DE-588)4221617-5 s Oberfläche (DE-588)4042907-6 s DE-604 Oberflächenbehandlung (DE-588)4042908-8 s Carr, William N. Sonstige oth |
| spellingShingle | Proceedings of the Topical Conference on Surface Microengineering 23 - 24 Oct. 1989, Hynes Convention Center, Boston, Mass. Oberflächenbehandlung (DE-588)4042908-8 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Oberfläche (DE-588)4042907-6 gnd |
| subject_GND | (DE-588)4042908-8 (DE-588)4221617-5 (DE-588)4042907-6 (DE-588)1071861417 |
| title | Proceedings of the Topical Conference on Surface Microengineering 23 - 24 Oct. 1989, Hynes Convention Center, Boston, Mass. |
| title_auth | Proceedings of the Topical Conference on Surface Microengineering 23 - 24 Oct. 1989, Hynes Convention Center, Boston, Mass. |
| title_exact_search | Proceedings of the Topical Conference on Surface Microengineering 23 - 24 Oct. 1989, Hynes Convention Center, Boston, Mass. |
| title_full | Proceedings of the Topical Conference on Surface Microengineering 23 - 24 Oct. 1989, Hynes Convention Center, Boston, Mass. spec. ed.: William N. Carr |
| title_fullStr | Proceedings of the Topical Conference on Surface Microengineering 23 - 24 Oct. 1989, Hynes Convention Center, Boston, Mass. spec. ed.: William N. Carr |
| title_full_unstemmed | Proceedings of the Topical Conference on Surface Microengineering 23 - 24 Oct. 1989, Hynes Convention Center, Boston, Mass. spec. ed.: William N. Carr |
| title_short | Proceedings of the Topical Conference on Surface Microengineering |
| title_sort | proceedings of the topical conference on surface microengineering 23 24 oct 1989 hynes convention center boston mass |
| title_sub | 23 - 24 Oct. 1989, Hynes Convention Center, Boston, Mass. |
| topic | Oberflächenbehandlung (DE-588)4042908-8 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Oberfläche (DE-588)4042907-6 gnd |
| topic_facet | Oberflächenbehandlung Mikrosystemtechnik Oberfläche Konferenzschrift 1989 Boston Mass. |
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