The role of microscopy in semiconductor failure analysis
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Hauptverfasser: | , |
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Format: | Buch |
Sprache: | English |
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Oxford
Oxford Univ. Press
1992
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Schriftenreihe: | Microscopy handbooks
25 |
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100 | 1 | |a Richards, B. P. |e Verfasser |4 aut | |
245 | 1 | 0 | |a The role of microscopy in semiconductor failure analysis |c B. P. Richards and P. K. Footner |
264 | 1 | |a Oxford |b Oxford Univ. Press |c 1992 | |
300 | |a VI, 108 S. |b zahlr. Ill. | ||
336 | |b txt |2 rdacontent | ||
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338 | |b nc |2 rdacarrier | ||
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650 | 4 | |a Microscopes | |
650 | 4 | |a Semiconductors |x Failures | |
650 | 4 | |a Semiconductors |x Testing | |
650 | 0 | 7 | |a Fehlererkennung |0 (DE-588)4133764-5 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
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689 | 1 | 1 | |a Halbleiterbauelement |0 (DE-588)4113826-0 |D s |
689 | 1 | 2 | |a Fehlererkennung |0 (DE-588)4133764-5 |D s |
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700 | 1 | |a Footner, P. K. |e Verfasser |4 aut | |
830 | 0 | |a Microscopy handbooks |v 25 |w (DE-604)BV002612606 |9 25 | |
943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-003506145 |
Datensatz im Suchindex
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any_adam_object | |
author | Richards, B. P. Footner, P. K. |
author_facet | Richards, B. P. Footner, P. K. |
author_role | aut aut |
author_sort | Richards, B. P. |
author_variant | b p r bp bpr p k f pk pkf |
building | Verbundindex |
bvnumber | BV005596695 |
callnumber-first | T - Technology |
callnumber-label | TK7871 |
callnumber-raw | TK7871.85 |
callnumber-search | TK7871.85 |
callnumber-sort | TK 47871.85 |
callnumber-subject | TK - Electrical and Nuclear Engineering |
classification_rvk | UH 6300 UH 6700 ZN 4800 |
classification_tum | ELT 364f |
ctrlnum | (OCoLC)25316466 (DE-599)BVBBV005596695 |
dewey-full | 621.3815/2/0287 621.381520287 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 621 - Applied physics |
dewey-raw | 621.3815/2/0287 621.381520287 |
dewey-search | 621.3815/2/0287 621.381520287 |
dewey-sort | 3621.3815 12 3287 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
format | Book |
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id | DE-604.BV005596695 |
illustrated | Illustrated |
indexdate | 2024-12-23T11:40:34Z |
institution | BVB |
isbn | 0198564325 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-003506145 |
oclc_num | 25316466 |
open_access_boolean | |
owner | DE-91 DE-BY-TUM DE-384 DE-11 |
owner_facet | DE-91 DE-BY-TUM DE-384 DE-11 |
physical | VI, 108 S. zahlr. Ill. |
publishDate | 1992 |
publishDateSearch | 1992 |
publishDateSort | 1992 |
publisher | Oxford Univ. Press |
record_format | marc |
series | Microscopy handbooks |
series2 | Microscopy handbooks |
spelling | Richards, B. P. Verfasser aut The role of microscopy in semiconductor failure analysis B. P. Richards and P. K. Footner Oxford Oxford Univ. Press 1992 VI, 108 S. zahlr. Ill. txt rdacontent n rdamedia nc rdacarrier Microscopy handbooks 25 Microscopie ram Semiconducteurs - Défauts ram Microscopes Semiconductors Failures Semiconductors Testing Fehlererkennung (DE-588)4133764-5 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Mikroskopie (DE-588)4039238-7 gnd rswk-swf Fehleranalyse (DE-588)4016608-9 gnd rswk-swf Halbleiterbauelement (DE-588)4113826-0 gnd rswk-swf Halbleiterbauelement (DE-588)4113826-0 s Fehleranalyse (DE-588)4016608-9 s Mikroskopie (DE-588)4039238-7 s DE-604 Fehlererkennung (DE-588)4133764-5 s Halbleiter (DE-588)4022993-2 s Footner, P. K. Verfasser aut Microscopy handbooks 25 (DE-604)BV002612606 25 |
spellingShingle | Richards, B. P. Footner, P. K. The role of microscopy in semiconductor failure analysis Microscopy handbooks Microscopie ram Semiconducteurs - Défauts ram Microscopes Semiconductors Failures Semiconductors Testing Fehlererkennung (DE-588)4133764-5 gnd Halbleiter (DE-588)4022993-2 gnd Mikroskopie (DE-588)4039238-7 gnd Fehleranalyse (DE-588)4016608-9 gnd Halbleiterbauelement (DE-588)4113826-0 gnd |
subject_GND | (DE-588)4133764-5 (DE-588)4022993-2 (DE-588)4039238-7 (DE-588)4016608-9 (DE-588)4113826-0 |
title | The role of microscopy in semiconductor failure analysis |
title_auth | The role of microscopy in semiconductor failure analysis |
title_exact_search | The role of microscopy in semiconductor failure analysis |
title_full | The role of microscopy in semiconductor failure analysis B. P. Richards and P. K. Footner |
title_fullStr | The role of microscopy in semiconductor failure analysis B. P. Richards and P. K. Footner |
title_full_unstemmed | The role of microscopy in semiconductor failure analysis B. P. Richards and P. K. Footner |
title_short | The role of microscopy in semiconductor failure analysis |
title_sort | the role of microscopy in semiconductor failure analysis |
topic | Microscopie ram Semiconducteurs - Défauts ram Microscopes Semiconductors Failures Semiconductors Testing Fehlererkennung (DE-588)4133764-5 gnd Halbleiter (DE-588)4022993-2 gnd Mikroskopie (DE-588)4039238-7 gnd Fehleranalyse (DE-588)4016608-9 gnd Halbleiterbauelement (DE-588)4113826-0 gnd |
topic_facet | Microscopie Semiconducteurs - Défauts Microscopes Semiconductors Failures Semiconductors Testing Fehlererkennung Halbleiter Mikroskopie Fehleranalyse Halbleiterbauelement |
volume_link | (DE-604)BV002612606 |
work_keys_str_mv | AT richardsbp theroleofmicroscopyinsemiconductorfailureanalysis AT footnerpk theroleofmicroscopyinsemiconductorfailureanalysis |