The role of microscopy in semiconductor failure analysis

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Richards, B. P. (VerfasserIn), Footner, P. K. (VerfasserIn)
Format: Buch
Sprache:English
Veröffentlicht: Oxford Oxford Univ. Press 1992
Schriftenreihe:Microscopy handbooks 25
Schlagworte:
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!

MARC

LEADER 00000nam a2200000 cb4500
001 BV005596695
003 DE-604
005 20200115
007 t|
008 921019s1992 xx a||| |||| 00||| engod
020 |a 0198564325  |9 0-19-856432-5 
035 |a (OCoLC)25316466 
035 |a (DE-599)BVBBV005596695 
040 |a DE-604  |b ger  |e rakddb 
041 0 |a eng 
049 |a DE-91  |a DE-384  |a DE-11 
050 0 |a TK7871.85 
082 0 |a 621.3815/2/0287  |2 20 
082 0 |a 621.381520287 
084 |a UH 6300  |0 (DE-625)159498:  |2 rvk 
084 |a UH 6700  |0 (DE-625)145770:  |2 rvk 
084 |a ZN 4800  |0 (DE-625)157408:  |2 rvk 
084 |a ELT 364f  |2 stub 
100 1 |a Richards, B. P.  |e Verfasser  |4 aut 
245 1 0 |a The role of microscopy in semiconductor failure analysis  |c B. P. Richards and P. K. Footner 
264 1 |a Oxford  |b Oxford Univ. Press  |c 1992 
300 |a VI, 108 S.  |b zahlr. Ill. 
336 |b txt  |2 rdacontent 
337 |b n  |2 rdamedia 
338 |b nc  |2 rdacarrier 
490 1 |a Microscopy handbooks  |v 25 
650 7 |a Microscopie  |2 ram 
650 7 |a Semiconducteurs - Défauts  |2 ram 
650 4 |a Microscopes 
650 4 |a Semiconductors  |x Failures 
650 4 |a Semiconductors  |x Testing 
650 0 7 |a Fehlererkennung  |0 (DE-588)4133764-5  |2 gnd  |9 rswk-swf 
650 0 7 |a Halbleiter  |0 (DE-588)4022993-2  |2 gnd  |9 rswk-swf 
650 0 7 |a Mikroskopie  |0 (DE-588)4039238-7  |2 gnd  |9 rswk-swf 
650 0 7 |a Fehleranalyse  |0 (DE-588)4016608-9  |2 gnd  |9 rswk-swf 
650 0 7 |a Halbleiterbauelement  |0 (DE-588)4113826-0  |2 gnd  |9 rswk-swf 
689 0 0 |a Halbleiterbauelement  |0 (DE-588)4113826-0  |D s 
689 0 1 |a Fehleranalyse  |0 (DE-588)4016608-9  |D s 
689 0 2 |a Mikroskopie  |0 (DE-588)4039238-7  |D s 
689 0 |5 DE-604 
689 1 0 |a Mikroskopie  |0 (DE-588)4039238-7  |D s 
689 1 1 |a Halbleiterbauelement  |0 (DE-588)4113826-0  |D s 
689 1 2 |a Fehlererkennung  |0 (DE-588)4133764-5  |D s 
689 1 |5 DE-604 
689 2 0 |a Halbleiter  |0 (DE-588)4022993-2  |D s 
689 2 1 |a Fehleranalyse  |0 (DE-588)4016608-9  |D s 
689 2 2 |a Mikroskopie  |0 (DE-588)4039238-7  |D s 
689 2 |5 DE-604 
700 1 |a Footner, P. K.  |e Verfasser  |4 aut 
830 0 |a Microscopy handbooks  |v 25  |w (DE-604)BV002612606  |9 25 
943 1 |a oai:aleph.bib-bvb.de:BVB01-003506145 

Datensatz im Suchindex

_version_ 1819231161665191936
any_adam_object
author Richards, B. P.
Footner, P. K.
author_facet Richards, B. P.
Footner, P. K.
author_role aut
aut
author_sort Richards, B. P.
author_variant b p r bp bpr
p k f pk pkf
building Verbundindex
bvnumber BV005596695
callnumber-first T - Technology
callnumber-label TK7871
callnumber-raw TK7871.85
callnumber-search TK7871.85
callnumber-sort TK 47871.85
callnumber-subject TK - Electrical and Nuclear Engineering
classification_rvk UH 6300
UH 6700
ZN 4800
classification_tum ELT 364f
ctrlnum (OCoLC)25316466
(DE-599)BVBBV005596695
dewey-full 621.3815/2/0287
621.381520287
dewey-hundreds 600 - Technology (Applied sciences)
dewey-ones 621 - Applied physics
dewey-raw 621.3815/2/0287
621.381520287
dewey-search 621.3815/2/0287
621.381520287
dewey-sort 3621.3815 12 3287
dewey-tens 620 - Engineering and allied operations
discipline Physik
Elektrotechnik / Elektronik / Nachrichtentechnik
format Book
fullrecord <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02237nam a2200637 cb4500</leader><controlfield tag="001">BV005596695</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20200115 </controlfield><controlfield tag="007">t|</controlfield><controlfield tag="008">921019s1992 xx a||| |||| 00||| engod</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0198564325</subfield><subfield code="9">0-19-856432-5</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)25316466</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV005596695</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield><subfield code="a">DE-384</subfield><subfield code="a">DE-11</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7871.85</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815/2/0287</subfield><subfield code="2">20</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381520287</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UH 6300</subfield><subfield code="0">(DE-625)159498:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UH 6700</subfield><subfield code="0">(DE-625)145770:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4800</subfield><subfield code="0">(DE-625)157408:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 364f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Richards, B. P.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">The role of microscopy in semiconductor failure analysis</subfield><subfield code="c">B. P. Richards and P. K. Footner</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Oxford</subfield><subfield code="b">Oxford Univ. Press</subfield><subfield code="c">1992</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">VI, 108 S.</subfield><subfield code="b">zahlr. Ill.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Microscopy handbooks</subfield><subfield code="v">25</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Microscopie</subfield><subfield code="2">ram</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Semiconducteurs - Défauts</subfield><subfield code="2">ram</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microscopes</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield><subfield code="x">Failures</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield><subfield code="x">Testing</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Fehlererkennung</subfield><subfield code="0">(DE-588)4133764-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikroskopie</subfield><subfield code="0">(DE-588)4039238-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Fehleranalyse</subfield><subfield code="0">(DE-588)4016608-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiterbauelement</subfield><subfield code="0">(DE-588)4113826-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleiterbauelement</subfield><subfield code="0">(DE-588)4113826-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Fehleranalyse</subfield><subfield code="0">(DE-588)4016608-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Mikroskopie</subfield><subfield code="0">(DE-588)4039238-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Mikroskopie</subfield><subfield code="0">(DE-588)4039238-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">Halbleiterbauelement</subfield><subfield code="0">(DE-588)4113826-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="2"><subfield code="a">Fehlererkennung</subfield><subfield code="0">(DE-588)4133764-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="2" ind2="0"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2="1"><subfield code="a">Fehleranalyse</subfield><subfield code="0">(DE-588)4016608-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2="2"><subfield code="a">Mikroskopie</subfield><subfield code="0">(DE-588)4039238-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Footner, P. K.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Microscopy handbooks</subfield><subfield code="v">25</subfield><subfield code="w">(DE-604)BV002612606</subfield><subfield code="9">25</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-003506145</subfield></datafield></record></collection>
id DE-604.BV005596695
illustrated Illustrated
indexdate 2024-12-23T11:40:34Z
institution BVB
isbn 0198564325
language English
oai_aleph_id oai:aleph.bib-bvb.de:BVB01-003506145
oclc_num 25316466
open_access_boolean
owner DE-91
DE-BY-TUM
DE-384
DE-11
owner_facet DE-91
DE-BY-TUM
DE-384
DE-11
physical VI, 108 S. zahlr. Ill.
publishDate 1992
publishDateSearch 1992
publishDateSort 1992
publisher Oxford Univ. Press
record_format marc
series Microscopy handbooks
series2 Microscopy handbooks
spelling Richards, B. P. Verfasser aut
The role of microscopy in semiconductor failure analysis B. P. Richards and P. K. Footner
Oxford Oxford Univ. Press 1992
VI, 108 S. zahlr. Ill.
txt rdacontent
n rdamedia
nc rdacarrier
Microscopy handbooks 25
Microscopie ram
Semiconducteurs - Défauts ram
Microscopes
Semiconductors Failures
Semiconductors Testing
Fehlererkennung (DE-588)4133764-5 gnd rswk-swf
Halbleiter (DE-588)4022993-2 gnd rswk-swf
Mikroskopie (DE-588)4039238-7 gnd rswk-swf
Fehleranalyse (DE-588)4016608-9 gnd rswk-swf
Halbleiterbauelement (DE-588)4113826-0 gnd rswk-swf
Halbleiterbauelement (DE-588)4113826-0 s
Fehleranalyse (DE-588)4016608-9 s
Mikroskopie (DE-588)4039238-7 s
DE-604
Fehlererkennung (DE-588)4133764-5 s
Halbleiter (DE-588)4022993-2 s
Footner, P. K. Verfasser aut
Microscopy handbooks 25 (DE-604)BV002612606 25
spellingShingle Richards, B. P.
Footner, P. K.
The role of microscopy in semiconductor failure analysis
Microscopy handbooks
Microscopie ram
Semiconducteurs - Défauts ram
Microscopes
Semiconductors Failures
Semiconductors Testing
Fehlererkennung (DE-588)4133764-5 gnd
Halbleiter (DE-588)4022993-2 gnd
Mikroskopie (DE-588)4039238-7 gnd
Fehleranalyse (DE-588)4016608-9 gnd
Halbleiterbauelement (DE-588)4113826-0 gnd
subject_GND (DE-588)4133764-5
(DE-588)4022993-2
(DE-588)4039238-7
(DE-588)4016608-9
(DE-588)4113826-0
title The role of microscopy in semiconductor failure analysis
title_auth The role of microscopy in semiconductor failure analysis
title_exact_search The role of microscopy in semiconductor failure analysis
title_full The role of microscopy in semiconductor failure analysis B. P. Richards and P. K. Footner
title_fullStr The role of microscopy in semiconductor failure analysis B. P. Richards and P. K. Footner
title_full_unstemmed The role of microscopy in semiconductor failure analysis B. P. Richards and P. K. Footner
title_short The role of microscopy in semiconductor failure analysis
title_sort the role of microscopy in semiconductor failure analysis
topic Microscopie ram
Semiconducteurs - Défauts ram
Microscopes
Semiconductors Failures
Semiconductors Testing
Fehlererkennung (DE-588)4133764-5 gnd
Halbleiter (DE-588)4022993-2 gnd
Mikroskopie (DE-588)4039238-7 gnd
Fehleranalyse (DE-588)4016608-9 gnd
Halbleiterbauelement (DE-588)4113826-0 gnd
topic_facet Microscopie
Semiconducteurs - Défauts
Microscopes
Semiconductors Failures
Semiconductors Testing
Fehlererkennung
Halbleiter
Mikroskopie
Fehleranalyse
Halbleiterbauelement
volume_link (DE-604)BV002612606
work_keys_str_mv AT richardsbp theroleofmicroscopyinsemiconductorfailureanalysis
AT footnerpk theroleofmicroscopyinsemiconductorfailureanalysis