76.2: Development of Highly Stable a-IGZO TFT with TiOx as a Passivation Layer for Active-Matrix Display

Titanium oxide (TiOx) was employed for passivation layer of indium‐gallium‐zinc oxide (a‐IGZO) TFTs. Molybdenum (Mo) and titanium (Ti) was used as a source‐drain metal. It is demonstrated the titanium layer could be used as an etch stopper layer to protect the back channel of a‐IGZO during Mo etching process and transformed into TiOx by the surface treatment using oxygen plasma. From device measurement, we have observed that Ion/Ioff ratio and mobility are ∼108 and 9 cm2 V−1 sec−1, respectively. AMLCD panel has been demonstrated to verify the device uniformity and performance.