X-Ray diagnostics of 2D deformation profiles in crystals with periodically distorted near-surface region
An algorithm for the restoration of two‐dimensional displacement fields of the crystal lattice atoms is developed for the case of distortions which are periodic in one direction. The method is based on triple‐crystal X‐ray diffractometry data and has high spatial resolution (up to 0.01 m̈m) and sens...
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| Veröffentlicht in: | Physica status solidi. A, Applied research Applied research, 1992-04, Vol.130 (2), p.263-271, Article 263 |
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| container_title | Physica status solidi. A, Applied research |
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| creator | Goureev, T. E. Yu. Nikulin, A. Petrashen, P. V. |
| description | An algorithm for the restoration of two‐dimensional displacement fields of the crystal lattice atoms is developed for the case of distortions which are periodic in one direction. The method is based on triple‐crystal X‐ray diffractometry data and has high spatial resolution (up to 0.01 m̈m) and sensitivity to lattice deformations of the order of Δd/d ≤ 10−7. The deformation profile in a silicon single‐crystal implanted by neon ions is restorated.
Ein Algorithmus für die Wiederherstellung von zweidimensionalen Verschiebungsfeldern der Kristalgitteratome wird für den Fall von Verzerrungen, die in einer Richtung periodisch sind, entwickelt. Die Methode beruht auf Tripel‐Kristall‐Röntgenbeugungsdaten und hat eine hohe räumliche Auflösung (bis zu 0,01 m̈m) und eine Empfindlichkeit gegenüber Gitterdeformationen der Größenordnung von Δd/d ≤ 10−7. Das Deformationsprofil in einem Siliziumeinkristall, der mit Neonionen implantiert wird, wird wiederhergestellt. |
| doi_str_mv | 10.1002/pssa.2211300202 |
| format | Article |
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Ein Algorithmus für die Wiederherstellung von zweidimensionalen Verschiebungsfeldern der Kristalgitteratome wird für den Fall von Verzerrungen, die in einer Richtung periodisch sind, entwickelt. Die Methode beruht auf Tripel‐Kristall‐Röntgenbeugungsdaten und hat eine hohe räumliche Auflösung (bis zu 0,01 m̈m) und eine Empfindlichkeit gegenüber Gitterdeformationen der Größenordnung von Δd/d ≤ 10−7. Das Deformationsprofil in einem Siliziumeinkristall, der mit Neonionen implantiert wird, wird wiederhergestellt.</description><identifier>ISSN: 0031-8965</identifier><identifier>EISSN: 1521-396X</identifier><identifier>DOI: 10.1002/pssa.2211300202</identifier><identifier>CODEN: PSSABA</identifier><language>eng</language><publisher>Berlin: WILEY-VCH Verlag</publisher><subject>Condensed matter: structure, mechanical and thermal properties ; Exact sciences and technology ; Physical radiation effects, radiation damage ; Physics ; Structure of solids and liquids; crystallography</subject><ispartof>Physica status solidi. A, Applied research, 1992-04, Vol.130 (2), p.263-271, Article 263</ispartof><rights>Copyright © 1992 WILEY‐VCH Verlag GmbH & Co. KGaA</rights><rights>1993 INIST-CNRS</rights><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c3202-238ca1c79c4bce1cf96c7391fa19b1c6445272be6279b5df2aa43e12d67902263</citedby></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://onlinelibrary.wiley.com/doi/pdf/10.1002%2Fpssa.2211300202$$EPDF$$P50$$Gwiley$$H</linktopdf><linktohtml>$$Uhttps://onlinelibrary.wiley.com/doi/full/10.1002%2Fpssa.2211300202$$EHTML$$P50$$Gwiley$$H</linktohtml><link.rule.ids>309,310,314,777,781,786,787,1412,23911,23912,25121,27905,27906,45555,45556</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=4538262$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Goureev, T. E.</creatorcontrib><creatorcontrib>Yu. Nikulin, A.</creatorcontrib><creatorcontrib>Petrashen, P. V.</creatorcontrib><title>X-Ray diagnostics of 2D deformation profiles in crystals with periodically distorted near-surface region</title><title>Physica status solidi. A, Applied research</title><addtitle>phys. stat. sol. (a)</addtitle><description>An algorithm for the restoration of two‐dimensional displacement fields of the crystal lattice atoms is developed for the case of distortions which are periodic in one direction. The method is based on triple‐crystal X‐ray diffractometry data and has high spatial resolution (up to 0.01 m̈m) and sensitivity to lattice deformations of the order of Δd/d ≤ 10−7. The deformation profile in a silicon single‐crystal implanted by neon ions is restorated.
Ein Algorithmus für die Wiederherstellung von zweidimensionalen Verschiebungsfeldern der Kristalgitteratome wird für den Fall von Verzerrungen, die in einer Richtung periodisch sind, entwickelt. Die Methode beruht auf Tripel‐Kristall‐Röntgenbeugungsdaten und hat eine hohe räumliche Auflösung (bis zu 0,01 m̈m) und eine Empfindlichkeit gegenüber Gitterdeformationen der Größenordnung von Δd/d ≤ 10−7. Das Deformationsprofil in einem Siliziumeinkristall, der mit Neonionen implantiert wird, wird wiederhergestellt.</description><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>Exact sciences and technology</subject><subject>Physical radiation effects, radiation damage</subject><subject>Physics</subject><subject>Structure of solids and liquids; crystallography</subject><issn>0031-8965</issn><issn>1521-396X</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1992</creationdate><recordtype>article</recordtype><recordid>eNp1kM9PwjAUxxujiYievfbgddgfW8fiiaCiCSoRjNyaR9dCdWxLO4P77y1iMB48vbzk-_nmvQ9C55T0KCHssvYeeoxRysNG2AHq0ITRiGdifog6hHAa9TORHKMT798IITFJSQet5tEztDi3sCwr31jlcWUwu8a5NpVbQ2OrEteuMrbQHtsSK9f6BgqPN7ZZ4Vo7W-VWQVFsS3xTuUbnuNTgIv_hDCiNnV6GklN0ZAKmz35mF73c3syGd9H4aXQ_HIwjxcPVEeN9BVSlmYoXSlNlMqFSnlEDNFtQJeI4YSlbaMHSbJHkhgHEXFOWizQjjAneRRe73hp8OMs4KJX1snZ2Da6VccL7TLAQS3Yx5SrvnTZS2eb728aBLSQlcmtVbq3KX6uBu9pxmyCk3df-E5eT6XTwh452dDClP_c0uHcpUp4m8vVxJEfTZBbPJg9yzL8A0s6Ndg</recordid><startdate>19920416</startdate><enddate>19920416</enddate><creator>Goureev, T. E.</creator><creator>Yu. Nikulin, A.</creator><creator>Petrashen, P. V.</creator><general>WILEY-VCH Verlag</general><general>WILEY‐VCH Verlag</general><general>Wiley-VCH</general><scope>BSCLL</scope><scope>IQODW</scope></search><sort><creationdate>19920416</creationdate><title>X-Ray diagnostics of 2D deformation profiles in crystals with periodically distorted near-surface region</title><author>Goureev, T. E. ; Yu. Nikulin, A. ; Petrashen, P. V.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c3202-238ca1c79c4bce1cf96c7391fa19b1c6445272be6279b5df2aa43e12d67902263</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1992</creationdate><topic>Condensed matter: structure, mechanical and thermal properties</topic><topic>Exact sciences and technology</topic><topic>Physical radiation effects, radiation damage</topic><topic>Physics</topic><topic>Structure of solids and liquids; crystallography</topic><toplevel>online_resources</toplevel><creatorcontrib>Goureev, T. E.</creatorcontrib><creatorcontrib>Yu. Nikulin, A.</creatorcontrib><creatorcontrib>Petrashen, P. V.</creatorcontrib><collection>Istex</collection><collection>Pascal-Francis</collection><jtitle>Physica status solidi. A, Applied research</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Goureev, T. E.</au><au>Yu. Nikulin, A.</au><au>Petrashen, P. V.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>X-Ray diagnostics of 2D deformation profiles in crystals with periodically distorted near-surface region</atitle><jtitle>Physica status solidi. A, Applied research</jtitle><addtitle>phys. stat. sol. (a)</addtitle><date>1992-04-16</date><risdate>1992</risdate><volume>130</volume><issue>2</issue><spage>263</spage><epage>271</epage><pages>263-271</pages><artnum>263</artnum><issn>0031-8965</issn><eissn>1521-396X</eissn><coden>PSSABA</coden><abstract>An algorithm for the restoration of two‐dimensional displacement fields of the crystal lattice atoms is developed for the case of distortions which are periodic in one direction. The method is based on triple‐crystal X‐ray diffractometry data and has high spatial resolution (up to 0.01 m̈m) and sensitivity to lattice deformations of the order of Δd/d ≤ 10−7. The deformation profile in a silicon single‐crystal implanted by neon ions is restorated.
Ein Algorithmus für die Wiederherstellung von zweidimensionalen Verschiebungsfeldern der Kristalgitteratome wird für den Fall von Verzerrungen, die in einer Richtung periodisch sind, entwickelt. Die Methode beruht auf Tripel‐Kristall‐Röntgenbeugungsdaten und hat eine hohe räumliche Auflösung (bis zu 0,01 m̈m) und eine Empfindlichkeit gegenüber Gitterdeformationen der Größenordnung von Δd/d ≤ 10−7. Das Deformationsprofil in einem Siliziumeinkristall, der mit Neonionen implantiert wird, wird wiederhergestellt.</abstract><cop>Berlin</cop><pub>WILEY-VCH Verlag</pub><doi>10.1002/pssa.2211300202</doi><tpages>9</tpages></addata></record> |
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| ispartof | Physica status solidi. A, Applied research, 1992-04, Vol.130 (2), p.263-271, Article 263 |
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| source | Wiley Online Library Journals Frontfile Complete |
| subjects | Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physical radiation effects, radiation damage Physics Structure of solids and liquids crystallography |
| title | X-Ray diagnostics of 2D deformation profiles in crystals with periodically distorted near-surface region |
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