The Generation of Molecular and Multiply Charged Ions in the Hollow-Cathode Ion Source
The generation of molecular and multiply charged ion beams is considered using modified versions of the hollow‐cathode ion source. Basing operation characteristics of the source are given and the values of molecular and multiply ion currents obtained from the source are also presented. [Russian Text...
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Veröffentlicht in: | Physica status solidi. A, Applied research Applied research, 1989-04, Vol.112 (2), p.815-819 |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | The generation of molecular and multiply charged ion beams is considered using modified versions of the hollow‐cathode ion source. Basing operation characteristics of the source are given and the values of molecular and multiply ion currents obtained from the source are also presented.
[Russian Text Ignored]. |
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ISSN: | 0031-8965 1521-396X |
DOI: | 10.1002/pssa.2211120250 |