Bulk Charging of Dielectric Films by Low Energy Electrons

Accumulation of space charges in metallized dielectric films irradiated by electrons of 30 to 65 keV energy is investigated using quasistationary approximation. Time dependent profiles of space charges and associated electric fields are calculated by numerical methods. There is a satisfactory agreem...

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Veröffentlicht in:Physica status solidi. A, Applied research Applied research, 1982-10, Vol.73 (2), p.361-366
Hauptverfasser: Tyutnev, A. P., Mingaleev, G. S., Saenko, V. S., Pozhidaev, E. D., Akkerman, A. F.
Format: Artikel
Sprache:eng
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