Plasma-Enhanced CVD Synthesis and Structural Characterization of Ta2N3
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| Veröffentlicht in: | ChemInform 2004-10, Vol.35 (43), p.no-no |
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| container_issue | 43 |
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| container_title | ChemInform |
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| creator | Ganin, Alexei Yu Kienle, Lorenz Vajenine, Grigori V. |
| description | For see ChemInform in Full Text. |
| doi_str_mv | 10.1002/chin.200443024 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0931-7597 |
| ispartof | ChemInform, 2004-10, Vol.35 (43), p.no-no |
| issn | 0931-7597 1522-2667 |
| language | eng |
| recordid | cdi_wiley_primary_10_1002_chin_200443024_CHIN200443024 |
| source | Wiley Online Library Journals Frontfile Complete |
| subjects | nitrogen nitrogen, N structure (solids and liquids) tantalum tantalum, Ta |
| title | Plasma-Enhanced CVD Synthesis and Structural Characterization of Ta2N3 |
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