Finite Element Modeling of Resonators

Finite element analysis (FEA) is a numerical method for finding an approximate solution to a set of differential equations. This method, widely known as the finite element method/finite element modeling or FEM, is commonly used in many engineering disciplines to model the behavior of complex systems. FEM can substantially shorten the design cycle and dramatically cut the research and development cost. The most widely used application of FEM in MEMS resonators is modal analysis. The quality factor (Q) of a mechanical resonator is a very important parameter that affects the performance in any application perceived for the resonator. Anchor loss, or clamping loss, is the quantification of the elastic energy radiation from the resonator through the structural elements connecting it to a frame. An important application of micromechanical resonators is in signal filtering when very high selectivity is required.