Development of Microtechnologies for the Realization of Chemical, Biochemical and/or Biological Microsensors

This chapter contains sections titled: Introduction Chemical sensors Development of silicon and polymer microtechnologies applied to chemical sensors Conclusion

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Bibliographische Detailangaben
1. Verfasser:	Temple‐Boyer, Pierre
Format:	Buchkapitel
Sprache:	eng
Schlagworte:	chemical microsensors, and obstacles chemical sensors chemical/biochemical/biological chemically sensitive resistors FET/MEMS microsensor realization microtechnologies silicon/polymer microtechnologies surface acoustic wave microsensors technological platforms
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	This chapter contains sections titled: Introduction Chemical sensors Development of silicon and polymer microtechnologies applied to chemical sensors Conclusion
DOI:	10.1002/9781118561799.ch10