Analysis of thin and thick Films

This chapter contains sections titled: Introduction Thin and Thick Layers: A Tentative Definition What Specific Information MS Techniques could Bring to thin and thick Films Analysis Compared to other Techniques? Main MS Techniques Applied to Thin/Thick Films Time of Sputtering/Speed of Acquisition Trade‐Off Differences in Sputtering/Ionization Mechanisms between SIMS and GD‐MS Pulse Shapes and how to Best Use Temporal Information for Pulsed Glow Discharge Mass Spectrometry Measurement and Data Interpretation in GD‐TOFMS Practical Examples Conclusions List of Abbreviations References