A SIMS instrument with electron and ion induced Auger electron detection

A SIMS instrument with electron and ion induced Auger electron detection

A general description is given of a specially designed ultra-high-vacuum DIMS instrument (a modified VG-SIMSLAB Mk3), built for combined dynamic secondary-ion mass spectrometry and Auger electron spectrometry (AES). Its potential is illustrated by examples of separate modes of operation. These inclu...

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Veröffentlicht in:Measurement science & technology 1992-11, Vol.3 (11), p.1087-1094
Hauptverfasser: Maydell, E A, Bolouri, H, Fabian, D J
Format: Artikel
Sprache:eng
Schlagworte:
Engineering
Engineering, Multidisciplinary
Instruments & Instrumentation
Science & Technology
Technology
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Beschreibung
Zusammenfassung:A general description is given of a specially designed ultra-high-vacuum DIMS instrument (a modified VG-SIMSLAB Mk3), built for combined dynamic secondary-ion mass spectrometry and Auger electron spectrometry (AES). Its potential is illustrated by examples of separate modes of operation. These include 'simultaneous' recording ot sims and AES signals, electron energy-loss measurements, and 'dynamic' ion-induced Auger depth profiling. The benefits and disadvantages of this multi-technique feature of the instrument are discussed.
ISSN:0957-0233
1361-6501
DOI:10.1088/0957-0233/3/11/012