OUTPUT CHARACTERISTICS OF A KRF LASER DEPENDENT ON THE F2 ABSORPTION IN INACTIVE REGIONS

OUTPUT CHARACTERISTICS OF A KRF LASER DEPENDENT ON THE F2 ABSORPTION IN INACTIVE REGIONS

Dependence of the output power of a discharge-pumped KrF laser on the F2 absorption in inactive regions bas been studied. The F2 absorption cross section at 248 nm was experimentally determined to be 1.6 x 10(-20) cm2. A greater than 15% increase in the output was obtained by filling the inactive re...

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Veröffentlicht in:JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS 1992-08, Vol.31 (8), p.2463-2464
Hauptverfasser: SHIMADA, Y, MIKI, T, MIMASU, M, KOSUGI, N, OGATA, Y
Format: Artikel
Sprache:eng
Schlagworte:
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Lasers
Optics
Physical Sciences
Physics
Physics, Applied
Science & Technology
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Zusammenfassung:Dependence of the output power of a discharge-pumped KrF laser on the F2 absorption in inactive regions bas been studied. The F2 absorption cross section at 248 nm was experimentally determined to be 1.6 x 10(-20) cm2. A greater than 15% increase in the output was obtained by filling the inactive regions on the optical path with a rare-gas mixture.
ISSN:0021-4922
DOI:10.1143/JJAP.31.2463