Low temperature deposition of high quality single crystalline AlN thin films on sapphire using highly oriented monolayer MoS 2 as a buffer layer

Low temperature deposition of high quality single crystalline AlN thin films on sapphire using highly oriented monolayer MoS 2 as a buffer layer

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Veröffentlicht in:Journal of crystal growth 2020-08, Vol.544, Article 125726
Hauptverfasser: Chien, Hung-Yi, Kuo, Po-Chun, Kao, Hui-Ling, Chen, Jyh-Shin, Chen, Meei-Ru, Lu, Li-Syuan, Chueh, Wei-Chen, Chang, Wen-Hao
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Crystallography
Materials Science
Materials Science, Multidisciplinary
Physical Sciences
Physics
Physics, Applied
Science & Technology
Technology
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container_title Journal of crystal growth
container_volume 544
creator Chien, Hung-Yi
Kuo, Po-Chun
Kao, Hui-Ling
Chen, Jyh-Shin
Chen, Meei-Ru
Lu, Li-Syuan
Chueh, Wei-Chen
Chang, Wen-Hao
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doi_str_mv 10.1016/j.jcrysgro.2020.125726
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subjects Crystallography
Materials Science
Materials Science, Multidisciplinary
Physical Sciences
Physics
Physics, Applied
Science & Technology
Technology
title Low temperature deposition of high quality single crystalline AlN thin films on sapphire using highly oriented monolayer MoS 2 as a buffer layer
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