Optical characterization of low temperature amorphous MoOx, WOX, and VOx prepared by pulsed laser deposition

•Amorphous MoOx, WOx, and VOx were prepared by pulsed laser deposition.•Films demonstrate high transparency and high work function.•Oxygen pressure is a key optimization parameter for pulsed laser deposition.•Photothermal deflection spectroscopy decouples absorptance and reflectance effects.•Absorpt...

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Veröffentlicht in:Thin solid films 2020-01, Vol.693, p.137690, Article 137690
Hauptverfasser: Horynová, Eva, Romanyuk, Oleksandr, Horák, Lukáš, Remeš, Zdeněk, Conrad, Brianna, Peter Amalathas, Amalraj, Landová, Lucie, Houdková, Jana, Jiříček, Petr, Finsterle, Tomáš, Holovský, Jakub
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Sprache:eng
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Zusammenfassung:•Amorphous MoOx, WOx, and VOx were prepared by pulsed laser deposition.•Films demonstrate high transparency and high work function.•Oxygen pressure is a key optimization parameter for pulsed laser deposition.•Photothermal deflection spectroscopy decouples absorptance and reflectance effects.•Absorption coefficient and refractive index for a range of materials are given.
ISSN:0040-6090
1879-2731
DOI:10.1016/j.tsf.2019.137690