Insight into influence of thermodynamic coefficients on transient negative capacitance in Zr-doped HfO2 ferroelectric capacitors

We study the influence of the thermodynamic coefficients on transient negative capacitance for the Zr-doped HfO2(HZO) ferroelectric capacitors by the theoretical simulation based on the Landau-Khalatnikov (L-K) theory and experi-mental measurement of electrical properties in the resistor-ferroelectric capacitor (R-FEC) circuit.Our results show that the thermodynamic coefficients α,β and γ also play a key role for the transient NC effect besides the viscosity coefficient and series resistor.Moreover,the smaller coefficients α and β,the more significant the transient NC effect.In addition,we also find that the thermodynamic process of transient NC does not obey the generally accepted viewpoint of Gibbs free energy minimization.