Transition characteristics from radio-frequency discharge to arc in hollow cathode configuration

The technique of glow discharges in radio frequency configuration was applied to ignite hollow cathode vacuum arc discharge. The effect of discharge parameters on the building up of hollow cathode arc discharge was investigated. The emission spectrum during the vacuum arc ignition process was measured to disclose the discharge dynamics. There exists a threshold radio frequency power （300 W）, beyond which hollow cathode is in T mode discharge status while radio frequency discharge changes into the arc discharge. With the increase of the radio frequency power, the plasma temperature and electronic density increase, and the discharge mode transits more rapidly. The ignition time of hollow cathode vacuum arc discharge is less than 4 s with a radio frequency power of 700 W.