Synthesis and Characterization of Pr(DPM) 3 Served as Precursor for MOCVD

Praseodymium β-diketone chelate, Pr(DPM) 3 [DPM = 2,2,6,6-tetramethyl-3,5-heptanedionato], was successfully synthesized from the inorganic salt praseodymium chloride and HDPM(2,2,6,6-tetramethyl-3,5-heptane-dione) in an ethanol/aqueous solution followed distillation at low pressure and recrystallization from toluene. The physical and thermal properties of the chelate, including volatility, stability, and thermal decomposition, were investigated by elemental analyses, 1H NMR spectroscopy, XRD, TG/DTG/DTA analysis, infrared spectroscopy, and mass spectroscopy. The chelate with high purity prepared by the authors of this study also shows sufficient volatility and stability in inert gases, which could be used as the precursor for metal-organic chemical vapor deposition (MOCVD).