Development of Numerical Model for Radio Frequency Atmospheric Pressure Glow Discharges in Argon
A one-dimensional, self-consistent fluid model is developed for a computational investigation on discharge characteristics and dynamics of radio frequency (RF) glow discharges in atmospheric argon, which are demonstrated through the spatial and temporal profiles of plasma species, electric field, an...
Gespeichert in:
Veröffentlicht in: | 东华大学学报(英文版) 2011-08, Vol.28 (4), p.391-395 |
---|---|
1. Verfasser: | |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | A one-dimensional, self-consistent fluid model is developed for a computational investigation on discharge characteristics and dynamics of radio frequency (RF) glow discharges in atmospheric argon, which are demonstrated through the spatial and temporal profiles of plasma species, electric field, and mean electron energy. Furthermore, in the discharge current density range from 7.1 mA/ cm2 to 119.5 mA/cm2 , different discharge operation modes of α and γ are indicated by changing differential conductivity of voltagecurrent characteristics and sheath dynamics in terms of sheath voltage and sheath thickness. |
---|---|
ISSN: | 1672-5220 |