Effect of Defect Structure on the Optical Dispersion Properties of Thin Films of TiNx

Effect of Defect Structure on the Optical Dispersion Properties of Thin Films of TiNx

Thin films of TiN with controlled composition were prepared by means of reactive electronbeam evaporation. Their microspecular reflectance was measured as a function of both wavelength and deviation from stoichiometry. The correlation between the electrical and optical properties as suggested by Hag...

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Veröffentlicht in:Zeitschrift für Naturforschung. A, A journal of physical sciences A journal of physical sciences, 1976-06, Vol.31 (6), p.642-644
1. Verfasser: De Maayer, P. J. P.
Format: Artikel
Sprache:eng
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Zusammenfassung:Thin films of TiN with controlled composition were prepared by means of reactive electronbeam evaporation. Their microspecular reflectance was measured as a function of both wavelength and deviation from stoichiometry. The correlation between the electrical and optical properties as suggested by Hagen-Rubens and Drude was demonstrated
ISSN:0932-0784
1865-7109
DOI:10.1515/zna-1976-0621